Yang Zhuoqing <br/><br/>
Advanced MEMS/NEMS fabrication and sensors 

 - New York  Springer  2022 
<br/><br/><label>ISBN: </label>9783030797492 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL
<br/><br/><label>Dewey Class. No.: </label>621.381