Ghandhi S. K. <br/><br/>
Vlsi Fabrication Principles. 

 - New York  John Wiley And Sons Inc.  2003 
 - 833p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ETC_ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.3815