Hsu T. R. <br/><br/>
Mems And Microsystems Design Manufacture And Nano Scale Engg. 

 - New York  John Wiely And Sons  2008 
 - 550p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL_PRODUCTION
<br/><br/><label>Dewey Class. No.: </label>621.381