| 000 | 00423nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 240220s9999 xx 000 0 und d | ||
| 020 | _a9783319070032 | ||
| 041 | _aENG | ||
| 100 | _aBarton C. Prorok | ||
| 245 | 0 | _a"MEMS and Nanotechnology, Volume 8" | |
| 260 | _aWiesbaden | ||
| 260 | _bSpringer | ||
| 260 | _c2015 | ||
| 365 | _b301.82 | ||
| 650 | _aETC_DIGITAL SYSTEM | ||
| 700 | _aLaVern Starman | ||
| 942 | _cEB | ||
| 999 |
_c12172 _d12172 |
||