000 00444nam a2200193Ia 4500
008 240220s9999 xx 000 0 und d
020 _a9789811636455
041 _aENG
082 _a610.28
100 _aJoshi S. N.
245 0 _aAdvanced micro and nano manufacturing technologies
260 _aNew York
260 _bSpringer
260 _c2022
365 _b55
650 _aMECHANICAL
700 _aChandra Pranjal
942 _cEB
999 _c13563
_d13563