| 000 | 00417nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 240220s9999 xx 000 0 und d | ||
| 020 | _a9789811694431 | ||
| 041 | _aENG | ||
| 082 | _a621.381 | ||
| 100 | _aKoul S. K. | ||
| 245 | 0 | _aMicromachined circuits and devices | |
| 260 | _aNew York | ||
| 260 | _bSpringer | ||
| 260 | _c2022 | ||
| 365 | _b55 | ||
| 650 | _aETC | ||
| 700 | _aDey Sukomal | ||
| 942 | _cEB | ||
| 999 |
_c13891 _d13891 |
||