000 00407nam a2200181Ia 4500
008 240220s9999 xx 000 0 und d
041 _aENG
082 _a621.816
100 _aMahalik N. P.
245 0 _aMicromanufacturing And Nanotechnology
250 _a1ST Ed.
260 _bSpringer
260 _c2006
300 _a468p.
365 _b5617.19
650 _aMECHANICAL_DESIGN
942 _cTEQUIP
999 _c2384
_d2384