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| 008 | 240220s9999 xx 000 0 und d | ||
| 041 | _aENG | ||
| 082 | _a621.3815302 | ||
| 100 | _aNishi Yoshb | ||
| 245 | 0 | _aHand Book Semiconductor Manufacturing Technology | |
| 260 | _aNULL | ||
| 260 | _bMarcel Dekker Inc. | ||
| 260 | _c2000 | ||
| 300 | _a1157p. | ||
| 365 | _b9106.5 | ||
| 650 | _aETC_ELECTRONICS | ||
| 942 | _cDBK | ||
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||