| 000 | 00452nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 240220s9999 xx 000 0 und d | ||
| 041 | _aENG | ||
| 082 | _a620.1 | ||
| 100 | _aMadou Marc .J. | ||
| 245 | 0 | _aFundamentals Of Microfabrication And Nanotechnology Vol.1 | |
| 250 | _a3 Ed. | ||
| 260 | _aNew York | ||
| 260 | _bCRC Press | ||
| 260 | _c2012 | ||
| 300 | _a641p. | ||
| 365 | _b4897.2 | ||
| 650 | _aMECHANICAL_PRODUCTION | ||
| 942 | _cDBK | ||
| 999 |
_c32250 _d32250 |
||