| 000 | 00439nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 240220s9999 xx 000 0 und d | ||
| 041 | _aENG | ||
| 082 | _a621.381 | ||
| 100 | _aHsu T. R. | ||
| 245 | 0 | _aMems And Microsystems Design Manufacture And Nano Scale Engg. | |
| 260 | _aNew York | ||
| 260 | _bJohn Wiely And Sons | ||
| 260 | _c2008 | ||
| 300 | _a550p. | ||
| 365 | _b8352 | ||
| 650 | _aMECHANICAL_PRODUCTION | ||
| 942 | _cDBK | ||
| 999 |
_c32275 _d32275 |
||