000 00427nam a2200181Ia 4500
008 240220s9999 xx 000 0 und d
041 _aENG
082 _a621.38
100 _aHsu T. R.
245 0 _aMems And Microsystem Design And Manufacturing
260 _aNew Delhi
260 _bMcgraw Hill Edu Pvt.Ltd
260 _c2013
300 _a1 TO 436p.
365 _b740
650 _aMECHANICAL_DESIGN
942 _cDBK
999 _c33179
_d33179